ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,412, issued on Dec. 2, was assigned to SEIKO EPSON Corp. (Japan).
"Method for manufacturing vibration element" was invented by Keiichi Yamaguchi (Ina, Japan), Hiyori Sakata (Minowa, Japan), Shigeru Shiraishi (Ina, Japan) and Ryuta Nishizawa (Nagano, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a vibration element including a first protective film formation step of forming a first protective film, a first dry etching step of performing dry etching via the first protective film to form first grooves and the outer shapes of vibrating arms, a second protective film formation step of forming a second protective film in t...