ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,627, issued on April 14, was assigned to SEIKO EPSON Corp. (Japan).
"Method for manufacturing vibration element" was invented by Takuro Kobayashi (Minowa, Japan), Hiyori Sakata (Shinagawa, Japan) and Akinori Yamada (Ina, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A vibration element manufacturing method includes a first dry etching step of dry-etching a quartz crystal substrate from the first surface side to form first grooves and the outer shapes of first and second vibrating arms, a second dry etching step of dry-etching the quartz crystal substrate from the second surface side to form second grooves and the outer shapes, and a wet etch...