US Patent Issued to SCREEN Holdings on Sept. 23 for "Centering device, centering method and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 23 -- United States Patent no. 12,424,473, issued on Sept. 23, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Centering device, centering method and substrate processing apparatus" was invented by Itsuki Kajino (Kyoto, Japan), Shoyo Minami (Kyoto, Japan) and Shuhei Nemoto (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate supported on a substrate support is surrounded by a first contact member located at a first reference position, a second contact member located at a second reference position and a third contact member located at a third reference position in the horizontal plane. These three contact members gradually approach the substrate while keepi...