US Patent Issued to SCREEN Holdings on Oct. 6 for "Substrate processing system" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,752,315, issued on Oct. 6, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate processing system" was invented by Shinichi Taniguchi (Kyoto, Japan) and Akihiro Iwasaki (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system including a rotation mechanism that controls a lifter to collectively immerse a plurality of substrates whose orientation has been changed into a vertical orientation in a batch processing tank to perform first batch processing, controls the lifter to collectively immerse the plurality of substrates whose orientation has been changed into the vertical posture in the batch processing t...