US Patent Issued to SCREEN Holdings on Oct. 27 for "Imaging device, inspection device, inspection method and substrate processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,774,964, issued on Oct. 27, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Imaging device, inspection device, inspection method and substrate processing apparatus" was invented by Daisuke Hishitani (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In a substrate processing apparatus according to the invention, a light source and an imager are arranged at a position distant from an object to be imaged such as a substrate, whereas a head unit is arranged at an imaging position. Diffused light is generated by diffusing and reflecting illumination light from the light source and illuminated a peripheral edge part of the object to be im...