US Patent Issued to SCREEN HOLDINGS on Nov. 3 for "Replacement end time determination method, substrate processing method, and substrate processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,257, issued on Nov. 3, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Replacement end time determination method, substrate processing method, and substrate processing apparatus" was invented by Noritake Sumi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In a replacement end time determination method in accordance with the present invention, in a dry state where a liquid to be replaced is not present in a chamber, a processing fluid is supplied and discharged in accordance with a predetermined supply/discharge recipe, and while the processing fluid is maintained in a supercritical state, a density profile is acquired to be used as a...