US Patent Issued to SCREEN Holdings on March 24 for "Substrate treating apparatus and substrate transporting method" (Japanese Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,583,019, issued on March 24, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate treating apparatus and substrate transporting method" was invented by Joji Kuwahara (Kyoto, Japan) and Koji Kaneyama (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The subs...