US Patent Issued to SCREEN Holdings on March 17 for "Centering device, centering method, and substrate processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,581,903, issued on March 17, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Centering device, centering method, and substrate processing apparatus" was invented by Hiroyuki Ueno (Kyoto, Japan) and Itsuki Kajino (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to the present invention, a substrate is surrounded in a horizontal plane on an upper surface of a substrate support by a first abutting member located at a first reference position, a second abutting member located at a second reference position, and a third abutting member located at a third reference position. The three abutting members make tiny movements repea...