US Patent Issued to SCREEN Holdings on July 7 for "Schedule creation method, schedule creating device, substrate processing apparatus, substrate processing system, and storage medium" (Japanese Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,675,752, issued on July 7, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Schedule creation method, schedule creating device, substrate processing apparatus, substrate processing system, and storage medium" was invented by Jun Kawai (Kyoto, Japan), Takashi Kasahara (Kyoto, Japan) and Keisuke Inugai (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A schedule creation method is a method for creating a time schedule by executing a learning step multiple times. The learning step includes sequentially placing patterns each indicating a procedure in a processing sequence in a timetable for defining a time schedule for respective elements...