US Patent Issued to SCREEN HOLDINGS on July 7 for "Replacement end time determination method, substrate processing method and substrate processing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,621, issued on July 7, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Replacement end time determination method, substrate processing method and substrate processing apparatus" was invented by Noritake Sumi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "This invention relates to a replacement end time determination method in a process of replacing a liquid to be replaced by a processing fluid in a supercritical state and a substrate. In the invention, a density profile is obtained at each of a dry state where the liquid to be replaced is not present in a chamber and a wet state where the liquid to be replaced is present in the chamb...