US Patent Issued to SCREEN HOLDINGS on July 28 for "Substrate processing apparatus and substrate processing system" (Japanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,691,481, issued on July 28, was assigned to SCREEN HOLDINGS Co. LTD. (Japan).

"Substrate processing apparatus and substrate processing system" was invented by Koji Ando (Kyoto, Japan), Tomohiro Motono (Kyoto, Japan) and Noritake Sumi (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus and a substrate processing system according to the invention includes a processing chamber having a processing space capable of accommodating a substrate inside, being provided with an aperture on a side surface thereof, which communicates with the processing space to cause the substrate to pass therethrough, and being disposed und...