ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,682, issued on Feb. 10, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).
"Control device, control method, and program" was invented by Hidehiro Maeda (Yokohama, Japan), Toshimasa Shimoda (Ageo, Japan), Hajime Mitsuishi (Yokohama, Japan), Hiroshi Mori (Tokyo), Kishou Takahata (Tokyo), Masahiro Yoshihashi (Abiko, Japan), Takashi Shiomi (Yokohama, Japan) and Yoshihiro Maehara (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A control device configured to control a supply condition of a gas which is supplied between two substrates that are to be bonded to each other by a substrate bonding device, is configured to control the supply conditio...