ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,691, issued on Dec. 23, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).
"Drawing apparatus, drawing system, and drawing method" was invented by Shota Majima (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a drawing apparatus capable of drawing with high accuracy on a surface having a shape whose height exceeds a focal depth without complicatedly adjusting focus of an optical system. A substrate can be placed on a stage. A drawing head includes a spatial light modulator that generates modulated light, and a projection optical system that focuses the modulated light on a focus position in a height direction over the s...