US Patent Issued to SCREEN Holdings on Aug. 11 for "Substrate transfer robot and substrate processing apparatus including substrate transfer robot" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,087, issued on Aug. 11, was assigned to SCREEN Holdings Co. Ltd. (Kyoto, Japan).

"Substrate transfer robot and substrate processing apparatus including substrate transfer robot" was invented by Yuichi Takayama (Kyoto, Japan), Hiroyuki Kawahara (Kyoto, Japan) and Takuya Sato (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate transfer robot includes a hand a robot control unit. The hand includes: four guides (including a guide disposed on a distal end of the hand body) that are provided on the top surface of a hand body, and receive an outer edge portion of the substrate; a pusher disposed on a proximal end of the hand body; a pu...