US Patent Issued to Sandisk Technologies on June 30 for "Three-dimensional memory device containing scaleless staircase structures and methods of forming the same" (Japanese Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,287, issued on June 30, was assigned to Sandisk Technologies Inc. (Milpitas, Calif.).

"Three-dimensional memory device containing scaleless staircase structures and methods of forming the same" was invented by Hirofumi Tokita (Yokkaichi, Japan) and Kazuto Ohsawa (Yokkaichi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of forming a staircase structure in a semiconductor device includes forming primary terrace patterns in an alternating stack, repeating a respective anisotropic etch process that etches unmasked portions of the alternating stack and a respective mask trimming process to form additional terrace patterns, determining if ...