US Patent Issued to SAMSUNG ELECTRONICS on Sept. 22 for "Semiconductor manufacturing apparatus, gas supplying method using the same, and semiconductor manufacturing method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,240, issued on Sept. 22, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Semiconductor manufacturing apparatus, gas supplying method using the same, and semiconductor manufacturing method using the same" was invented by Chan Kyu Lim (Suwon-si, South Korea), Yoonbon Koo (Suwon-si, South Korea), Hanhim Kang (Suwon-si, South Korea), Suji Gim (Suwon-si, South Korea) and Jongkoo Lim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides methods and apparatuses for supplying a process gas in a semiconductor manufacturing process. In some embodiments, the method includes heating, using ...