US Patent Issued to SAMSUNG ELECTRONICS on Sept. 15 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,454, issued on Sept. 15, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Substrate processing apparatus" was invented by Jongbeom Moon (Suwon-si, South Korea), Hadong Jin (Suwon-si, South Korea), Kyung-Sun Kim (Suwon-si, South Korea), Sung-Yeol Kim (Suwon-si, South Korea), Hyosin Kim (Suwon-si, South Korea), Donghyeon Na (Suwon-si, South Korea), Chunyoon Park (Suwon-si, South Korea) and Sungyong Lim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various example embodiments of the present disclosure provide a substrate processing apparatus including a chamber, an excitation power supply configured to gen...