US Patent Issued to SAMSUNG ELECTRONICS on Sept. 15 for "Focus ring, substrate processing apparatus including the same, and semiconductor fabrication method using the same" (South Korean Inventor)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,738,462, issued on Sept. 15, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Focus ring, substrate processing apparatus including the same, and semiconductor fabrication method using the same" was invented by Hyungsik Ko (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a focus ring, the focus ring includes a central axis that extends in a first direction, a top surface having a first inner diameter, a bottom surface having a second inner diameter that is smaller than the first inner diameter, and an inner lateral surface between the top surface and the bottom surface,...