US Patent Issued to SAMSUNG ELECTRONICS on Oct. 27 for "Monitoring system for manufacturing semiconductor device and monitoring method for manufacturing the semiconductor device using the same" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,775,217, issued on Oct. 27, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).

"Monitoring system for manufacturing semiconductor device and monitoring method for manufacturing the semiconductor device using the same" was invented by Dong-Hyub Lee (Suwon-si, South Korea), Jeong-Gil Kim (Suwon-si, South Korea) and Hyuck Shin (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A monitoring system for manufacturing a semiconductor device comprises a source module, an optical module including a collector collecting and reflecting extreme ultraviolet generated light from the source module, an illumination optical syste...