ALEXANDRIA, Va., March 31 -- United States Patent no. 12,590,249, issued on March 31, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Etchant composition" was invented by Jung-ah Kim (Hwaseong-si, South Korea), Young-chan Kim (Suwon-si, South Korea), Hyo-san Lee (Hwaseong-si, South Korea), Hoon Han (Anyang-si, South Korea), Jin-uk Lee (Sejong-si, South Korea), Jung-hun Lim (Daejeon, South Korea) and Ik-hee Kim (Gongju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An etchant composition and a method of fabricating a semiconductor device, the composition including an inorganic acid; about 0.01 parts by weight to about 0.5 parts by weight of colloidal silica; about 0.01 p...