US Patent Issued to SAMSUNG ELECTRONICS on March 31 for "Canister, precursor transfer system having the same and method for measuring precursor remaining amount thereof" (South Korean Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,590,366, issued on March 31, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Canister, precursor transfer system having the same and method for measuring precursor remaining amount thereof" was invented by Kyungrim Kim (Suwon-si, South Korea), Dowon Kim (Suwon-si, South Korea), Sunja Kim (Suwon-si, South Korea) and Youngeun Kim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A canister supplying a precursor to a processing chamber includes a body, a first valve introducing a carrier gas into the body, a second valve discharging a sublimated gas of a solid precursor into a processing chamber, a precursor acco...