ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,144, issued on March 3, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Semiconductor inspection apparatus" was invented by Junho Shin (Suwon-si, South Korea), Wookrae Kim (Suwon-si, South Korea), Hyungjin Kim (Suwon-si, South Korea), Seungbeom Park (Suwon-si, South Korea), Jangwoon Sung (Suwon-si, South Korea), Myungjun Lee (Suwon-si, South Korea) and Hojun Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor inspection apparatus includes a light source portion configured to output a first beam, an extreme-ultraviolet filter disposed in a path of the first beam output from the light source...