US Patent Issued to SAMSUNG ELECTRONICS on March 24 for "Apparatus for manufacturing semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,215, issued on March 24, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus for manufacturing semiconductor device" was invented by Byunghwan Kong (Uiwang-si, South Korea), Hyouncheol Kim (Hwaseong-si, South Korea), Junseong Park (Seoul, South Korea), Jaewon Yu (Suwon-si, South Korea), Hyunju Lee (Seoul, South Korea), Kwanghyun Jin (Hwaseong-si, South Korea) and Youngmin Ha (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for manufacturing a semiconductor device includes a boat configured to support a plurality of stacked substrates, a first tube surrounding the boat in a lateral directio...