US Patent Issued to SAMSUNG ELECTRONICS on March 17 for "Light detection and ranging (LiDAR)-based inspection device and method of manufacturing semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,467, issued on March 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Light detection and ranging (LiDAR)-based inspection device and method of manufacturing semiconductor device" was invented by Sungyoon Ryu (Seoul, South Korea), Younghoon Sohn (Seoul, South Korea) and Yusin Yang (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a light detection and ranging (LiDAR)-based inspection device including an ultrafast pulse source configured to generate a first ultrafast pulse and a second ultrafast pulse each having a pulse width ranging from 1 fs to 100 fs, a stage configured to generate a gating ...