US Patent Issued to SAMSUNG ELECTRONICS on March 17 for "Apparatus for cleaning an extreme ultraviolet light creation chamber" (South Korean Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,661, issued on March 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Apparatus for cleaning an extreme ultraviolet light creation chamber" was invented by Dohyun Jung (Suwon-si, South Korea), Youngduk Suh (Suwon-si, South Korea), Sungwook Kang (Suwon-si, South Korea), Sanggon Shin (Suwon-si, South Korea), Seunghee Lee (Suwon-si, South Korea) and Jinwook Jung (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for cleaning an EUV light creation chamber may include a cleaning module, a first movement module and a second movement module. The first movement module may support the cleaning module...