US Patent Issued to SAMSUNG ELECTRONICS on June 9 for "Optical measurement apparatus, optical measurement method using the same, and method for manufacturing semiconductor device using the same" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,650,389, issued on June 9, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Optical measurement apparatus, optical measurement method using the same, and method for manufacturing semiconductor device using the same" was invented by Min Ho Rim (Suwon-si, South Korea) and Young Hoon Sohn (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a semiconductor device includes generating light, modulating power of the light to generate power-modulated light, acquiring an image signal of a measurement target using the power-modulated light, filtering the image signal to separate a real signal and a...