US Patent Issued to SAMSUNG ELECTRONICS on June 30 for "Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same" (South Korean Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,669,382, issued on June 30, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same" was invented by Yeon Tae Kim (Suwon-si, South Korea), Hun Yong Park (Suwon-si, South Korea), Yihwan Kim (Suwon-si, South Korea), Ji Hoon Kim (Suwon-si, South Korea) and Kee Soo Park (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate temperature measuring device includes a sensor which senses a first amount of light of a first light having a first wavelength, a second amount of l...