US Patent Issued to SAMSUNG ELECTRONICS on June 23 for "Ultrapure water production system, semiconductor processing system including the same, and semiconductor fabrication method using the same" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,662,405, issued on June 23, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).

"Ultrapure water production system, semiconductor processing system including the same, and semiconductor fabrication method using the same" was invented by Juhui Park (Suwon-si, South Korea), Jongha Yun (Suwon-si, South Korea) and Younhaeng Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are ultrapure water production systems, semiconductor processing systems, and semiconductor fabrication methods. An ultrapure water production system may include a front filtering part that filters a fluid and a rear filtering part th...