US Patent Issued to SAMSUNG ELECTRONICS on June 16 for "Method of managing semiconductor processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,656,692, issued on June 16, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Method of managing semiconductor processing apparatus" was invented by Junho Shin (Suwon-si, South Korea), Seungbeom Park (Suwon-si, South Korea), Jangwoon Sung (Suwon-si, South Korea), Hojun Lee (Suwon-si, South Korea), Wookrae Kim (Suwon-si, South Korea) and Myungjun Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a method of managing a semiconductor processing apparatus, including irradiating, by a light source, a plurality of regions included in a diffuser on a mask stage with extreme ultraviolet (EUV) light, refle...