ALEXANDRIA, Va., July 28 -- United States Patent no. 12,694,194, issued on July 28, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-Si, South Korea).
"Method for fabricating photomask layout and method for fabricating of semiconductor device using the same" was invented by Sung-Yong Moon (Seoul, South Korea) and Won-Chan Lee (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for fabricating a photomask layout is provided. The method includes: receiving a first layout including a main pattern; generating a second layout by generating an assist feature in consideration of optical properties of the main pattern in the first layout; generating a third layout by performing optic...