ALEXANDRIA, Va., July 14 -- United States Patent no. 12,678,882, issued on July 14, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).
"Substrate processing apparatus" was invented by Jung Sik Park (Suwon-si, South Korea) and Jong Chul Kim (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus that reduces and/or minimizes contamination of mounting boards. The substrate processing apparatus includes a frame with an opening formed at its bottom and including an internal space; a first plate below the frame; and a second plate below the first plate. The first plate includes a plurality of first holes. The second plate includes a plurality of...