US Patent Issued to SAMSUNG ELECTRONICS on July 14 for "Substrate inspection apparatus and method of inspecting a substrate using the same" (South Korean Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,681,072, issued on July 14, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).

"Substrate inspection apparatus and method of inspecting a substrate using the same" was invented by Jaewon Yang (Suwon-si, South Korea), Younghoon Sohn (Suwon-si, South Korea), Souk Kim (Suwon-si, South Korea), Jaeho Kim (Suwon-si, South Korea), Jongbeom Kim (Suwon-si, South Korea), HyeonBo Shim (Suwon-si, South Korea) and Minho Rim (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate inspection apparatus includes a laser light source configured to emit a laser beam, an optical splitter configured to split the laser beam into a...