ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,433, issued on Jan. 27, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"Focus control method for spectroscopic measuring apparatus, inspection method for semiconductor device, and spectroscopic measuring apparatus for performing the same" was invented by Youngsun Choi (Suwon-si, South Korea), Soonyang Kwon (Suwon-si, South Korea), Kwangrak Kim (Suwon-si, South Korea), Jiwoong Kim (Suwon-si, South Korea), Jangryul Park (Suwon-si, South Korea) and Myungjun Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "In a focus control method of a spectroscopic measuring apparatus, the spectroscopic measuring apparat...