ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,954, issued on Feb. 24, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Temperature control system and temperature control method for semiconductor manufacturing device" was invented by Hyeonjun Yun (Suwon-si, South Korea), Sangsu Yeh (Suwon-si, South Korea), Minsu Lee (Suwon-si, South Korea), Jonghwa Kim (Suwon-si, South Korea) and Jooyeop Nam (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature control system of a semiconductor manufacturing device includes first and second heating media storages that respectively store low-temperature heating media and high-temperature heating media, a mixing ...