US Patent Issued to SAMSUNG ELECTRONICS on Feb. 17 for "Focus ring, substrate processing apparatus including the same, and substrate processing method using the same" (South Korean Inventor)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,555,754, issued on Feb. 17, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Focus ring, substrate processing apparatus including the same, and substrate processing method using the same" was invented by Hyungsik Ko (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Focus rings, substrate processing apparatuses, and substrate processing methods are provided. A focus ring includes a ring body having an axis that extends in a first direction. The ring body includes a top surface, an inner lateral surface that downwardly extends from the top surface, and a bottom surface that outwardly extends from a lower end of th...