US Patent Issued to SAMSUNG ELECTRONICS on Feb. 17 for "Apparatus and method monitoring semiconductor manufacturing equipment" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,587, issued on Feb. 17, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (South Korea).

"Apparatus and method monitoring semiconductor manufacturing equipment" was invented by Sungho Jang (Suwon-si, South Korea), Hyungjin Kim (Suwon-si, South Korea), Minhwan Seo (Suwon-si, South Korea), Akinori Okubo (Suwon-si, South Korea), Sangmin Lee (Suwon-si, South Korea), Sinyong Lee (Suwon-si, South Korea), Wondon Joo (Suwon-si, South Korea) and Sangjoon Hong (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus monitoring semiconductor manufacturing equipment includes an optical detector, a light generator generating light along an o...