ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,393, issued on Feb. 10, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"Substrate processing apparatus" was invented by Jihwan Kim (Suwon-si, South Korea), Dongseok Han (Suwon-si, South Korea), Kyung-Sun Kim (Suwon-si, South Korea), Heewon Min (Suwon-si, South Korea), Mingil Kim (Suwon-si, South Korea), Yirop Kim (Suwon-si, South Korea), Junghyun Song (Suwon-si, South Korea), Kuihyun Yoon (Suwon-si, South Korea), Woojin Jang (Suwon-si, South Korea) and Seunghee Cho (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes an O-ring defined by a central axis, a first guide r...