ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,071, issued on Feb. 10, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Spin coater" was invented by Sunghwan Kim (Suwon-si, South Korea), Kyungwon Kang (Suwon-si, South Korea), Dongwook Kim (Suwon-si, South Korea), Seungjoon Song (Suwon-si, South Korea), Seok Heo (Suwon-si, South Korea), Younseon Wang (Suwon-si, South Korea) and Dasom Lee (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A spin coater may include a spin chuck, a nozzle, a first temperature controller and a second temperature controller. The spin chuck may be configured make contact with a central portion of a lower surface of a substrate a...