ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,004, issued on Feb. 10, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Semiconductor manufacturing apparatus" was invented by Jae Hyun Yang (Suwon-si, South Korea), Sang Yub Ie (Hwaseong-si, South Korea), Tae Yong Kim (Suwon-si, South Korea) and Phil Ouk Nam (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor manufacturing apparatus including a process chamber and a boat having a support member supporting substrates arranged in a first direction. An inner tube encloses the boat and includes a slit along a side wall. A nozzle supplies a process gas and includes a gas injection port at a positi...