ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,505,993, issued on Dec. 23, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Semiconductor fabrication facility" was invented by Jonghyun Lee (Seongnam-si, South Korea), Sungseung Lim (Yongin-si, South Korea) and Yoodong Yang (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a semiconductor fabrication facility including a chamber, a gas supply configured to provide reaction gas to the chamber, a plurality of vacuum pumps respectively configured to pump the reaction gas from the chamber, an exhaust apparatus that is connected to the plurality of vacuum pumps and configured to purify the reaction g...