ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,701,946, issued on Aug. 4, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Buffing cleaning apparatus" was invented by Inhak Jeon (Suwon-si, South Korea), Donghoon Kwon (Suwon-si, South Korea), Jihoon Park (Suwon-si, South Korea), Seungyong Yu (Suwon-si, South Korea) and Byungsoo Joo (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A buffing cleaning apparatus includes chuck table having a vacuum hole, and a film disposed on an upper surface of the chuck table, the film having a communication hole vertically overlapping the vacuum hole. An upper surface of the film is configured to receive a wafer. The film has...