ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,399,429, issued on Aug. 26, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).
"Semiconductor fabrication apparatus" was invented by Ohkug Kwon (Yongin-si, South Korea), Sanghun Kim (Seoul, South Korea), Junghwan Kim (Bucheon-si, South Korea), Sangbeom Park (Hwaseong-si, South Korea), Youngduk Suh (Seoul, South Korea), Jinwook Jung (Suwon-si, South Korea), Kukbin Choi (Hwaseong-si, South Korea), Dongkyeng Han (Suwon-si, South Korea) and Tae-Hyun Han (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor fabrication apparatus comprising a light source configured to emit light, a substrate stage arrange...