US Patent Issued to SAMSUNG ELECTRONICS, Korea Institute of Machinery & Materials on Sept. 8 for "Scrubber, substrate processing system including the same, and substrate processing method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,770, issued on Sept. 8, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea) and Korea Institute of Machinery & Materials (Daejeon, South Korea).

"Scrubber, substrate processing system including the same, and substrate processing method using the same" was invented by Mukyeong Kim (Suwon-si, South Korea), Hyun Seok Kim (Suwon-si, South Korea), Sejin Park (Suwon-si, South Korea), Hong Jae Kang (Daejeon, South Korea), Dae-Hoon Lee (Daejeon, South Korea), Jeongan Choi (Daejeon, South Korea), Kwan-Tae Kim (Sejong-si, South Korea), You-Na Kim (Seoul, South Korea), Hohyun Song (Daejeon, South Korea), Heesoo Lee (Gwacheon-si, South Korea), Younghoon Song (Daejeon, South K...