ALEXANDRIA, Va., May 26 -- United States Patent no. 12,637,771, issued on May 26, was assigned to SAMSUNG DISPLAY Co. LTD. (Gyeonggi-Do, South Korea).
"Substrate processing apparatus" was invented by Choelmin Jang (Seoul, South Korea), Junggon Kim (Hwaseong-si, South Korea), Min-Gyu Park (Cheonan-si, South Korea), Heeyong Lee (Seongnam-si, South Korea), Eun Jung (Uiwang-si, South Korea) and Myungsoo Huh (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus may include a chamber having a working space, maintaining a vacuum state, and including an upper wall positioned on the working space, a nozzle assembly positioned in the working space, and including nozzles...