ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,503,361, issued on Dec. 23, was assigned to ROHM Co. LTD. (Kyoto, Japan).
"MEMS sensor and method of manufacturing MEMS sensor" was invented by Daisuke Kaminishi (Kyoto, Japan), Martin Wilfried Heller (Kyoto, Japan) and Toma Fujita (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS sensor includes: a first substrate having a cavity partially exposed on the surface of the first substrate; an electrode of a sensor element provided on the first substrate and arranged in the cavity; a support portion provided on the first substrate and configured to support the electrode; an element isolation portion formed on the first substrate so as to c...