US Patent Issued to Robert Bosch on Sept. 29 for "Method for producing a micromechanical device comprising a cavity having a melt seal" (German Inventors)

ALEXANDRIA, Va., Sept. 30 -- United States Patent no. 12,747,156, issued on Sept. 29, was assigned to Robert Bosch GmbH (Stuttgart, Germany).

"Method for producing a micromechanical device comprising a cavity having a melt seal" was invented by Raphael Schuler (Tuebingen, Germany) and Volker Schmitz (Pfullingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for producing a micromechanical device. The method includes: providing a MEMS substrate having micromechanical functional layers bounding a cavity; structuring an oxide layer to form an oxide mask having at least one first recess having a first diameter; applying a resist mask to the oxide mask and the first recess; introducing a second ...