ALEXANDRIA, Va., June 16 -- United States Patent no. 12,655,018, issued on June 16, was assigned to ROBERT BOSCH GMBH (Stuttgart, Germany).
"Method for producing a microelectromechanical component" was invented by Johannes Classen (Reutlingen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method producing a microelectromechanical component. A dielectric layer is structured on an upper side of a substrate forming a grating, and a blind hole is formed beneath the grating. A cover layer is arranged on the dielectric layer closing the blind hole. A layer sequence is arranged on the cover layer and above the blind hole. Functional structures are formed in the layer sequence and an access channel extend...