ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,786, issued on July 21, was assigned to Robert Bosch GmbH (Stuttgart, Germany) and Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Method for operating an optical component, and optical component" was invented by Ralf Noltemeyer (Herrenberg, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a method for operating an optical component having a mirror element, a substrate for carrying the mirror element, an actuator device for tilting the mirror element about one or two tilt axes, which actuator device has a first actuator electrode structure and a second actuator electrode structure, and a sensor device for detecting a tilt ...