ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,619, issued on Aug. 18, was assigned to Robert Bosch GmbH (Stuttgart, Germany) and Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Microelectromechanical apparatus with heating element" was invented by Ralf Noltemeyer (Herrenberg, Germany) and Arnd Kaelberer (Schlierbach, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a microelectromechanical apparatus comprising one or more microelectromechanical devices each having a mirror element, an actuator for moving the respective mirror element, and a heating element for heating the respective mirror element, wherein the microelectromechanical apparatus comprises one or more tem...