ALEXANDRIA, Va., June 16 -- United States Patent no. 12,657,685, issued on June 16, was assigned to Powerchip Semiconductor Manufacturing Corp. (Hsinchu, Taiwan).
"Wafer optical inspection system and inspection method" was invented by Ke-Fen Chen (Hsinchu, Taiwan), Yu-Chih Lin (Hsinchu, Taiwan), Lin-Ho Ko (Hsinchu, Taiwan) and Po-Yang Chen (Hsinchu, Taiwan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer optical inspection system, including an image capturing device, which consists of a photosensitive device, an LED source and a laser source. The LED source generates a reflective feature at the edge of a batch wafers, and the laser source generates a contour feature at the edge of the batch wafers. The...